Semi-Automated Acid Stations for clean room applications
CSE’s Wafer Processing Equipment includes Semi-Automated Stations which are available in a wide verity of configurations. Our semi-automated robots gives you the process uniformity without paying the fully automated price. All robots are servo controlled with 3 degrees of freedom (see attached video). This motion control gives you precise developing, etching or cleaning processes. All robots are built and designed in-house giving you complete turnkey support. Our software engineers design and write the software in house. We do not outsource or subcontract our automation design.
Benefits:
Automation control with touch screen
Servo motor automation
No outsourcing for robotic and software design
SolidWorks Simulation Professional software
SolidWorks Flow Simulation software
Features:
White polypropylene construction
Available in any size and length to meet you requirement
All stations wired per NFPA 70 & 79
PCL with touch screen and GUI (graphic user interface)
Servo motor motors with encoder feed back
Emergency Power Off (EPO) with mushroom button and all safety interlocks
All process tanks with 1” lip exhaust
N2 head case purge
Photohelic with interlock to EPO
PVC safety shields
Teflon N2 gun and DI water hand spray
Continuous flow DI water manifold
Casters and leg levelers
One year warranty on all parts
2 copies paper manual and one complete set of paperless
Options for Semi-Automated Stations:
FM4910 (PVC-C) material of construction
Rear access design
Data logging
Remote access maintenance
Servo motor with pneumatics
In house SolidWorks Flow Simulator software with report and drawings including 3D model
In house SolidWorks Simulator Professional with reports and drawings including 3D model
Third party certification for NFPA 70 & 70
Semi standard, CE mark and NEC certification available
Seismic zone 4 structural certification
Fan Filter Units (HEPA)
Lift station designed into bench
Dedicated drains to carboy with DOT containment
Overhead deck lighting
Light tower (3-color)
Counter balance safety shields
Applications:
KOH Etching
Developing
SC1 & SC2
Megasonic Cleaning
BOE (Buffered Oxide Etching)
If you have any questions about our wafer processing equipment or semi-automated stations or need to discuss your requirements, call us at +086 513 87733829.