CSE chemical distribution delivery system and mix-blend chemical delivery systems are targeted at the most demanding processing requirements used to manufacture microelectronic devices. The CDS 2001 Series bulk chemical delivery systems are used for acids and bases. The chemical delivery modules are designed to distribute chemicals throughout the Fab with continuous filtered recirculation.
The CDS-SS 2001-SS Series bulk chemical delivery systems are used for solvents. The chemical delivery modules are designed to distribute chemicals through out the Fab with continuous filtered recirculation.
Dual drum systems available
Main distribution unit requests chemicals via operator command
Includes on-demand blending
Precise metering of solutions and tracking included
Chemical Dispense System Details