Dry to Dry Acid/Base Wet Process equipment for clean room applications
CSE’s Dry to Dry process equipment like our Fully Automated Equipment is available in a wide verity of configurations for your wet process requirements. We work with your engineering team to design the best wet processing / etching or cleaning equipment for your application. We handle all process sizes from standard wafer carriers, glass substrates to 30” x 60” glass solar panels. All wet process, etching or cleaning components are built and designed in-house giving you complete turnkey support. Our dry to dry process station utilizes our MVD Series IPA Dryer. This feature allows you continue to the next process step without having to dry in a separate drying tool.
Standard Features:
White polypropylene construction
On board IPA Vapor Dryer (MVD Series)
Available in any size and length to meet you requirement
All stations wired per NFPA 70 & 79
PCL with touch screen/GUI (graphic user interface)
Servo motor motors with encoder feed back
Emergency Power Off (EPO) with mushroom button and all safety interlocks
All wet process tanks equipped with 1” lip exhaust
N2 head case purge with interlock
Photohelic with interlock to EPO
PVC safety shields
Teflon N2 gun and DI water hand spray
Continuous flow DI water manifold
Casters and leg levelers
One year warranty on all parts
2 copies paper manual and one complete set of paperless
Options:
FM4910 (PVC-C) material of construction
Rear access design
Data logging
On line support
Resistivity monitoring control
All Teflon plumbing
In house SolidWorks Flow Simulator software with report and drawings including 3D model
In house SolidWorks Simulator Professional with reports and drawings including 3D model
Chemical management interface
Third party certification for NFPA 70 & 70
Semi standard, CE mark and NEC certification available
Seismic zone 4 structural certification
Fan Filter Units (HEPA)
Lift station designed into bench
Dedicated drains to carboy with DOT containment
Overhead deck lighting
Fire suppression system
Light tower (3-color)
Extended warranty available
Applications:
KOH Etching
Diffusion Clean
Ozone Etching
Ozone Cleaning
SC1 & SC2 featuring Megasonic Cleaning
BOE (Buffered Oxide Etching)
SPM Clean
Hot phosphoric (Nitride Etching)