Fully-Automated Acid/Base Stations for clean room applications
CSE offers manual, semi-automated as well as fully automated wet process benches and chemical stations that make up an extensive product line of wafer fabrication equipment. In addition, CSE develops customized solutions to satisfy the requirements of a wide variety of customers. CSE’s wet benches and chemical stations can handle both acid and solvent applications and all standard process sizes, from standard wafer carriers and glass substrates to 30″ x 60″ glass solar panels.
The fully automated stations use in house designs and the latest technology to improve process yields. As components become more densely packed, precise control of process times and chemical dosage become important for improving results. To comply with strict environmental regulations, chemical waste has to be minimized and neutralization of discharges ensured. Full automation means that human error is eliminated, chemical usage is reduced and the process is tightly controlled.
With CSE’s SolidWorks Simulation Professional and SolidWorks Flow Simulation software, customers can improve etch rates and throughput while maintaining the highest output quality. The number of mistakes is reduced and the chemical dosage is calculated accurately. Tracking of chemical usage reduces waste and ensures correct usage according to the specific application. The process environment remains consistent at all times and processes are fully repeatable.
Modutek’s engineers work closely with each customer to design chemical stations and wafer fabrication equipment that meets the requirements of the each application. Standard equipment modules and software can be customized for any wet bench processing / etching or cleaning application. Modutek’s software engineers design and write all software in house. All robotic equipment is designed, assembled and tested in house at the Modutek’s facility in San Jose, California and all wafer fabrication equipment is tested there using de-ionized water. The result is that CSE can offer unparalleled end-to-end customer support including final acceptance testing and comprehensive after sales customer service.
Benefits of CSE’s Fully Automated Wafer Fabrication Equipment Include:
In house customization to meet customer process requirements
Precise automated process execution and reliable repeatability
Improved yield and reduced errors
SolidWorks Simulation software for accurate calculation of process parameters
In House robotic and software design
Complete design, assembly and test at one location
Over 30 years of continuous operation with outstanding customer support
Standard Features:
White polypropylene construction
Available in any size and length to meet you requirement
All stations wired per NFPA 70 & 79
PCL with touch screen/GUI (graphic user interface)
Servo motor motors with encoder feed back
Emergency Power Off (EPO) with mushroom button and all safety interlocks
All process tanks with 1” lip exhaust
N2 head case purge with interlock
Photohelic with interlock to EPO
PVC safety shields
Teflon N2 gun and DI water hand spray
Continuous flow DI water manifold
Casters and leg levelers
One year warranty on all parts
2 copies paper manual and one complete set of paperless
Options:
FM4910 (PVC-C) material of construction
Stainless steel construction for solvent application
Dry to Dry Process
Rear access design
Data logging
On line support
Resistivity monitoring control
All Teflon plumbing
In house SolidWorks Flow Simulator software with report and drawings including 3D model
In house SolidWorks Simulator Professional with reports and drawings including 3D model
Chemical management interface
Third party certification for NFPA 70 & 70
Semi standard, CE mark and NEC certification available
Seismic zone 4 structural certification
Fan Filter Units (HEPA)
Lift station designed into bench
Dedicated drains to carboy with DOT containment
Overhead deck lighting
Fire suppression system
Light tower (3-color)
Extended warranty available
Applications of Modutek’s Wafer Fabrication Equipment Include:
KOH Etching
Ozone Etching
Ozone Cleaning
SC1 & SC2 featuring Megasonic Cleaning
Precision Part Cleaning
BOE (Buffered Oxide Etching)
SPM Cleaning
Plating
Quartz cleaning
All solvent applications
Hot phosphoric (Nitride Etching)
If you need more information on any of semi-automated or fully automated wafer fabrication equipment call us at +086 513 87733829 or fill out our contact us form.