IPA Vapor Dryer (Marangoni Drying) using gradient technology
IPA Vapor Dryer (Marangoni Drying) Top View
IPA Vapor Dryer also known as Marangoni drying gives you a very competitive alternative to your drying requirements. One (1) single drying chamber allows for DI water rinsing and IPA Vapor Drying in one free standing unit. IPA vapor is generated inside your standard one gallon bottle so bottle change is very easy and quick. IPA bottle change is at deck level in our exhausted compartment with level sensor protection. IPA vapor is introduced through the top cover of the drying tank allowing for even vapor distribution. This reduces your IPA consumption and still gives you surface tension drying across all wafers or substrates. Ozone can also be introduced to the drying process to eliminate trace organic impurities. We work with your engineering team to design the best IPA Vapor Dryer (Marangoni Drying) for your application. We handle all process sizes from standard wafer (one or two) carriers to glass substrates. Our SolidWorks Simulation Professional and SolidWorks Flow Simulation give you the process flow characteristic you require. This advanced software will improve your drying time. All drying equipment is designed, assembled and tested at our facility in San Jose, CA. We do not outsource or subcontract our IPA vapor dryer (Marangoni Dryer) design. Final acceptance testing at Modutek is always available. All testing is performed using DI water. To get a quote on our IPA Vapor Dryer (Marangoni Drying) call +086 513 87733829.
Benefits of IPA Vapor Dryer (Marangoni Drying) Include:
Very low IPA consumption
No watermarks
No moving parts inside drying chamber eliminating wafer breakage
Most drying cycles completed in 10-15 minutes
Drying technology can be easily designed into your wet bench eliminating one transfer step
Standard Features of IPA Vapor dryer (Marangoni drying):
White polypropylene construction
30” wide cabinet
All IPA Vapor Dryers wired per NFPA 70 & 79
PCL with touch screen/GUI (graphic user interface)
Multiple recipe function
Auto lid with foot switch open and double switch close
All Teflon fitting s, tubing and water valves
DI water degassing using membrane contactor
Emergency Power Off (EPO) with mushroom button and all safety interlocks
Hot N2 dry feature
N2 head case purge with interlock
Photohelic with interlock to EPO
PVC side shields (removable)
Continuous flow DI water manifold
Casters and leg levelers
Light tower (3-color)
One year warranty on all parts
2 copies paper manual and one complete set of paperless
OptionS:
FM4910 (PVC-C) material of construction
Manual lid
Ozone feature
Quick dump feature
Static eliminator
Data logging
On line support
Resistivity monitoring control
Semi standard, CE mark and NEC certification available
Seismic zone 4 structural certification
Fan Filter Units (HEPA)
Overhead deck lighting
Fire suppression system
Applications:
Wafer drying
Ozone Cleaning